JPH0215132B2 - - Google Patents
Info
- Publication number
- JPH0215132B2 JPH0215132B2 JP22941182A JP22941182A JPH0215132B2 JP H0215132 B2 JPH0215132 B2 JP H0215132B2 JP 22941182 A JP22941182 A JP 22941182A JP 22941182 A JP22941182 A JP 22941182A JP H0215132 B2 JPH0215132 B2 JP H0215132B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- piezoelectric substrate
- metal film
- electrodes
- insulating plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 26
- 239000002184 metal Substances 0.000 claims description 20
- 229910052751 metal Inorganic materials 0.000 claims description 20
- 238000000034 method Methods 0.000 claims description 15
- 238000005530 etching Methods 0.000 claims description 10
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 238000005240 physical vapour deposition Methods 0.000 claims description 8
- 238000007740 vapor deposition Methods 0.000 claims description 4
- 238000007733 ion plating Methods 0.000 claims description 3
- 238000004544 sputter deposition Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 description 18
- 238000000605 extraction Methods 0.000 description 12
- 239000000853 adhesive Substances 0.000 description 8
- 230000001070 adhesive effect Effects 0.000 description 8
- 239000003990 capacitor Substances 0.000 description 5
- 230000008878 coupling Effects 0.000 description 4
- 238000010168 coupling process Methods 0.000 description 4
- 238000005859 coupling reaction Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 229910000679 solder Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
- H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
- H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22941182A JPS59122008A (ja) | 1982-12-27 | 1982-12-27 | チツプ状圧電共振子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22941182A JPS59122008A (ja) | 1982-12-27 | 1982-12-27 | チツプ状圧電共振子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59122008A JPS59122008A (ja) | 1984-07-14 |
| JPH0215132B2 true JPH0215132B2 (en]) | 1990-04-11 |
Family
ID=16891795
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22941182A Granted JPS59122008A (ja) | 1982-12-27 | 1982-12-27 | チツプ状圧電共振子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59122008A (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4638468A (en) * | 1984-08-03 | 1987-01-20 | Raytheon Company | Polymer hydrophone array with multilayer printed circuit wiring |
-
1982
- 1982-12-27 JP JP22941182A patent/JPS59122008A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59122008A (ja) | 1984-07-14 |
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